| The
IL1440A system was designed for direct measurement
of the UV and blue visible irradiance used for exposing
photoresist coated substrates in test and production
environments. The low profile (12.5 mm high) XRL
probe can be placed right inside most exposure systems.
The IL1440-A offers autoranging during exposure
integration. |
Dynamic
Range: 300 nW/cm2 to 1 W/cm2
Spectral Range: 320 to 475 nm |
