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IL1440-B PHOTORESIST RADIOMETER SYSTEM

 

XRL140B DETECTOR

(XRL340B = 1/10 sensitivity)

 

 

The IL1440-B employs UV filtering designed specifically for photoresist applications requiring a peak sensitivity in the UVA and subdued response in the blue. The 'B' response is also useful for isolating the 365 mm mercury line. The IL1440-B autoranges during exposure integration.

Dynamic Range: 30 nW/cm2 to 250 mW/cm2
Spectral Range: 326 to 401 nm

 



 

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